Miniature thermoacoustic cryocooler driven by a vertical comb-drive

Zhili Hao; Mark Fowler; Jay A Hammer; Michael R Whitley; David Brown

doi:10.1117/12.472893

21 January 2003 Miniature thermoacoustic cryocooler driven by a vertical comb-drive

Zhili Hao, Mark Fowler, Jay A Hammer, Michael R Whitley, David Brown

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.472893
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

In this paper, we propose a novel miniature MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The basic idea is to exploit a new way to realize a highly-reliable miniature cryo-cooler, which would allow integration of a cryogenic cooling system directly into a cryogenic electronic device. A vertical comb-drive is proposed as the means to provide an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across the stack in the tube, thereby enabling heat exchange between two heat exchangers. The use of gray scale technology to fabricate tapered resonant tube provides a way to improve the efficiency of the cooling system, compared with a simple cylinder configuration. Furthermore, a tapered tube leads to extremely strong standing waves with relatively pure waveforms and reduces possible harmonics. The working principle of this device is described here. The fabrication of this device is considered, which is compatible with current MEMS fabrication technology. Finally, the theoretical analysis of key components of this cryo-cooler is presented.

Citation Download Citation

Zhili Hao, Mark Fowler, Jay A Hammer, Michael R Whitley, and David Brown "Miniature thermoacoustic cryocooler driven by a vertical comb-drive", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); https://doi.org/10.1117/12.472893

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KEYWORDS

Microelectromechanical systems

Acoustics

Cryogenics

Electronic components

Etching

Cooling systems

Photomasks

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