Nonlinear dynamics and control of a dual-capacitively driven torsional MEMS scanning mirror

Margaret K. Brown; Gary Mansouri

doi:10.1117/12.472864

20 January 2003 Nonlinear dynamics and control of a dual-capacitively driven torsional MEMS scanning mirror

Margaret K. Brown, Gary Mansouri

Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003) https://doi.org/10.1117/12.472864
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Dual capacitively driven MEMS mirrors, when driven with a sinusoidally varying voltage, will experience a nonlinear torque. Nonlinearities arise from the nonlinear relationship between voltage and torque and the fact that the capacitor gap is a function of the angular displacement of the mirror. At high maximum scan angles, the dynamics of the mirror exhibit behavior similar to that of a nonlinear harmonic oscillator with a softening spring. This behavior is characterized by amplitude instability relative to frequency and results in the need to implement additional control algorithms to achieve stable operation. In this work we present experimental results demonstrating the effects of the nonlinearities and the implications of these nonlinearities for high fidelity image rendering using these scanning mirrors. We then present an analysis of the nonlinearities in the system showing significant nonlinearities up to the 10^th order. We present numerical results consistent with the observed behavior of the MEMS scanning mirror. Next, we present an analysis showing that the nonlinearities can be significantly reduced applying a non-sinusoidal voltage signal. Finally, we discuss control issues, solutions and implications for high fidelity image rendering using these scanning mirrors.

Citation Download Citation

Margaret K. Brown and Gary Mansouri "Nonlinear dynamics and control of a dual-capacitively driven torsional MEMS scanning mirror", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); https://doi.org/10.1117/12.472864

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available