Limits of 3D nanostructures fabricated by focused electron beam (FEB) induced deposition

P. Hoffmann; I. Utke; F. Cicoira

doi:10.1117/12.510421

11 June 2003 Limits of 3D nanostructures fabricated by focused electron beam (FEB) induced deposition

P. Hoffmann, I. Utke, F. Cicoira

Proceedings Volume 5023, 10th International Symposium on Nanostructures: Physics and Technology; (2003) https://doi.org/10.1117/12.510421
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

The focused electron beam of an electron microscope (SEM or TEM) decomposes tailored precursor molecules on substrates into functional deposits. Extremely high aspect ratios of more than 10 can easily be obtained. During the last years several materials could be deposited, most of them composed of metal nanoparticles embedded in amorphous matrices. The deposition process depends on the precursor supply, its surface adsorption behavior, and the beam induced chemical decomposition path of the molecule on one hand, and on the other hand on the electron beam properties like beam current, electron energy, and beam distribution. The limits in minimal size, growth rate, and chemical composition arise from all mentioned parameters, which are interdependent.

Citation Download Citation

P. Hoffmann, I. Utke, and F. Cicoira "Limits of 3D nanostructures fabricated by focused electron beam (FEB) induced deposition", Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); https://doi.org/10.1117/12.510421

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available