Repeller field debris mitigation approach for EUV sources

K. Takenoshita; Chiew-Seng Koay; Martin C. Richardson; I. C. Edmond Turcu

doi:10.1117/12.504570

16 June 2003 Repeller field debris mitigation approach for EUV sources

K. Takenoshita, Chiew-Seng Koay, Martin C. Richardson, I. C. Edmond Turcu

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.504570
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

We describe studies of the debris produced from a high-repetition-rate laser plasma EUVL source based on the mass-limited target concept. In particular, we are developing mass-limited target designs based on complex targets containing tin. Comprehensive analysis of witness-plate detection techniques can reveal many interesting details of the interaction regime, and the impact of the debris. These techniques include Optical Microscopy, Scanning Electron Microscopy, Atomic Force Microscopy, X-ray Photoelectron Spectroscopy, Auger Electron Spectroscopy, and Auger Electron Microscopy. We also describe developments of the repeller field concept of debris inhibition. This technique uses electrostatic fields to reduce the flux of plasma ions impinging on the EUV collimating optics. Here, the first measurements of debris mitigation of a tin-doped target are described, and comparisons with earlier measurements of the impact of repeller fields on ion emission from a mass-limited water-droplet target are made.

Citation Download Citation

K. Takenoshita, Chiew-Seng Koay, Martin C. Richardson, and I. C. Edmond Turcu "Repeller field debris mitigation approach for EUV sources", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.504570

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available