Enhancement of CD uniformity and throughput with KrF photomask repeater

Tae-Joong Ha; Yong-Kyoo Choi; Oscar Han

doi:10.1117/12.485359

26 June 2003 Enhancement of CD uniformity and throughput with KrF photomask repeater

Tae-Joong Ha, Yong-Kyoo Choi, Oscar Han

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485359
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

It is intended to clarify the feasibity of 0.15 μm generation mask fabrication with the photomask repeater that is based on a KrF stepper(step-and-repeat exposure system). In a photomask repeater patterning, a daughter mask is exposed to KrF light through a mother mask. Inter-field registration accuracy(3sigma) is 14 nm in X direction and 28nm in Y direction within a 80mm ×100mm area on a daughter mask and intra-field registration accuracy(3sigma) is 21nm in X direction and 26nm in Y direction within a 18.4mm ×23.0mm field on a daughter mask. Inter-field CD uniformity (3sigma) is 8nm in 100mm ×100mm area on a daughter mask and intra-field CD uniformity (3sigma) is 24nm within a 18.4mm ×23.0mm field on a daughter mask. The errors of registration and CD within a field can be improved by compensating for these errors to a mother mask. With the compensation, the intra-field registration error can be reduced to about 13.5nm and the intra-field CD uniformity (3sigma) can be improved into 15nm. Pattern fidelity in the KrF photomask repeater is inferior to that in the e-beam process. So we need to apply OPC pattern to a mother mask in order to get an equivalent pattern fidelity to profiles in the e-beam process.

Citation Download Citation

Tae-Joong Ha, Yong-Kyoo Choi, and Oscar Han "Enhancement of CD uniformity and throughput with KrF photomask repeater", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485359

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available