Image fidelity improvement through optical proximity correction and its limits

Martin Burkhardt; Nakgeuon Seong

doi:10.1117/12.485466

26 June 2003 Image fidelity improvement through optical proximity correction and its limits

Martin Burkhardt, Nakgeuon Seong

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485466
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Lack of image fidelity, such as corner rounding and line end foreshortening, can have adverse effects on semiconductor devices and circuits, and its magnitude is of interest to lithography integration into the device flow. Yet corner rounding is rarely quantified. The question arises which fraction of the problem can be corrected by optical proximity correction, and which fraction cannot be corrected because of the spatial frequency limitation of the image transfer process. Image fidelity problems typically get worse with highly coherent illumination settings that are used for alternating phase shifting masks, so it is important to investigate corner rounding in connection with such masks. Equally, it is important to understand the impact of numerical aperture on corner rounding. Because of its simple shape, a corner lends itself to simulated and experimental evaluation. We propose a metrology algorithm for corner rounding and investigate it with simulation and experiment. We study the impact of optical settings, mask parameters, and serifs on corner rounding and discuss the impact on optical proximity correction.

Citation Download Citation

Martin Burkhardt and Nakgeuon Seong "Image fidelity improvement through optical proximity correction and its limits", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485466

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available