Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)

Timothy D. Stanley; Richard J. Markle; Brad Van Eck; Brian K. Cusson; Matthew A. Purdy; K. J. Stanley

doi:10.1117/12.485316

1 July 2003 Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)

Timothy D. Stanley, Richard J. Markle, Brad Van Eck, Brian K. Cusson, Matthew A. Purdy, K. J. Stanley

Proceedings Volume 5044, Advanced Process Control and Automation; (2003) https://doi.org/10.1117/12.485316
Event: Advanced Microelectronic Manufacturing, 2003, Santa Clara, CA, United States

Abstract

This paper takes published improvements in fabricator metrics that result from Advanced Process Control,and, applying an International SEMATECH cost model to the results, quantifies the expected economic impact. By converting the improvements in factory metrics to dollars, they can be compared. The benefits are given by equipment type, and by factory benefit mechanism. The majority of these calculations are based on Run-to-Run control.

Citation Download Citation

Timothy D. Stanley, Richard J. Markle, Brad Van Eck, Brian K. Cusson, Matthew A. Purdy, and K. J. Stanley "Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)", Proc. SPIE 5044, Advanced Process Control and Automation, (1 July 2003); https://doi.org/10.1117/12.485316

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