Composite thermal micro-actuator array for tactile displays

Eniko T. Enikov; Kalin V. Lazarov

doi:10.1117/12.483565

22 July 2003 Composite thermal micro-actuator array for tactile displays

Eniko T. Enikov, Kalin V. Lazarov

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.483565
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 x 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

Citation Download Citation

Eniko T. Enikov and Kalin V. Lazarov "Composite thermal micro-actuator array for tactile displays", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.483565

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