Advanced laser optics for laser material processing

Keiji Ebata; Keiji Fuse; Takayuki Hirai; Kenichi Kurisu

doi:10.1117/12.541164

18 November 2003 Advanced laser optics for laser material processing

Keiji Ebata, Keiji Fuse, Takayuki Hirai, Kenichi Kurisu

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541164
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

The demand for uniform intensity distribution is rising rapidly in the field of thermal processing. In this study we propose beam homogenizers with aspheric lenses or diffractive optical elements (DOE) that can convert a non-uniform Gaussian distribution into a top-hat-shaped uniform intensity distribution. The circular beam homogenizer consists of two aspheric lenses. And we propose several types of beam homogenizer, namely, rectangular and linear using DOE technology. Especially, we present a spot array generation homogenizer that can anneal several points simultaneously. This paper suggests possibilities of advance laser optics for new types of laser material processing.

Citation Download Citation

Keiji Ebata, Keiji Fuse, Takayuki Hirai, and Kenichi Kurisu "Advanced laser optics for laser material processing", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541164

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