Sub-micron sized periodic 3D surface structures fabricated by femtosecond UV laser pulses

Jan-Hendrik Klein-Wiele; Peter Simon

doi:10.1117/12.540757

18 November 2003 Sub-micron sized periodic 3D surface structures fabricated by femtosecond UV laser pulses

Jan-Hendrik Klein-Wiele, Peter Simon

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540757
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Generation of versatile periodic 3d structures with sub-micron precision on material surfaces is demonstrated. The technique is based on a novel beam splitting scheme applying separate diffractive elements. The incoming beam is split into multiple beams whose phase relations are controlled with almost arbitrary precision by only changing the distance between the diffractive elements. Combining this technique with a reflective imaging system, temporal and spatial overlap of all beams with interferometric precision is automatically obtained. The periodic 3d structures are generated through multi-beam interference in the overlapping region of the beams. The shape of the resulting pattern depends on the phase relationship of the interfering beams and can be strongly altered by simple translation of only one diffractive element. We demonstrate the capability of the method for femtosecond laser treatment of solids. Using sub picosecond laser pulses at 248 nm, sub-micron features with different shapes are ablated on the surface of polyimide samples. The size of the achieved structures is well below 1 micron, in special cases even reaching the 100 nm limit.

Citation Download Citation

Jan-Hendrik Klein-Wiele and Peter Simon "Sub-micron sized periodic 3D surface structures fabricated by femtosecond UV laser pulses", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540757

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