High-NA focusing grating coupler using a blue laser

Yeung Joon Sohn; Yongwoo Park; Dongwoo Suh; Hojun Ryu; Mun Cheol Paek

doi:10.1117/12.533128

16 September 2003 High-NA focusing grating coupler using a blue laser

Yeung Joon Sohn, Yongwoo Park, Dongwoo Suh, Hojun Ryu, Mun Cheol Paek

Proceedings Volume 5069, Optical Data Storage 2003; (2003) https://doi.org/10.1117/12.533128
Event: Optical Data Storage 2003, 2003, Vancouver, Canada

Abstract

A focusing grating coupler (FGC) using a blue laser of a wavelength of 400 nm as a light source was fabricated for the first time. The FGC was designed to have a numerical aperture of 0.48 and a focusing angle of zero. The focal length and the grating area were 900 μm and 1×1mm², respectively. Grating pattern of a minimum period of 0.2μm was fabricated on a single mode waveguide based on the boron phosphor silicate glass (BPSG) material by electron-beam lithography process using the vector scan method. The spot size at the full width (1/e²) was measured at 0.85 and 0.92μM in x and y direction, respectively, and these values are nearly same as the diffraction limited size.

Citation Download Citation

Yeung Joon Sohn, Yongwoo Park, Dongwoo Suh, Hojun Ryu, and Mun Cheol Paek "High-NA focusing grating coupler using a blue laser", Proc. SPIE 5069, Optical Data Storage 2003, (16 September 2003); https://doi.org/10.1117/12.533128

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available