Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air

Jorn Bonse; Martin Munz; Heinz Sturm

doi:10.1117/12.499050

29 April 2003 Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air

Jorn Bonse, Martin Munz, Heinz Sturm

Author Affiliations +

Proceedings Volume 5118, Nanotechnology; (2003) https://doi.org/10.1117/12.499050
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Laser ablation of single-crystalline indium phosphide (InP) was performed in air by means of linearly polarized Ti:sapphire femtosecond-pulses (800 nm, 130 fs, 10 Hz). As a result of the first laser pulses, several morphological changes (crater formation, rim formation, ripple structures and cones) were observed. These effects were explored using force modulation microscopy (FMM), a technique based on scanning force microscopy (SFM), allowing the simultaneous imaging of both topography and local stiffness at a high lateral resolution. The first laser pulse induces the formation of a protruding rim (height <20 nm, width ~300 nm) bordering the ablated crater. A Fourier-analysis of the multi-pulse generated topographies reveals the formation of wavelength-sized periodic ripples (modulation depth <100 nm) with an orientation perpendicular to that of the electric field vector of the laser radiation. Besides these morphological alterations, also material modifications were observed in the irradiated regions by means of the FFM technique. Within the ablated craters, local stiffness variations were found revealing an inhomogeneous material composition/structure as a consequence of the femtosecond pulse laser treatment.

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Jorn Bonse, Martin Munz, and Heinz Sturm "Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air", Proc. SPIE 5118, Nanotechnology, (29 April 2003); https://doi.org/10.1117/12.499050

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