Results of a long-term test of an ArF-mini-excimer laser

Andreas Goertler; C. Hartmann; C. Strowitzki

doi:10.1117/12.515516

10 November 2003 Results of a long-term test of an ArF mini-excimer laser

Andreas Goertler, C. Hartmann, C. Strowitzki

Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515516
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland

Abstract

A mini-excimer laser with a specially designed laser tube was operated at a constant energy of 8 mJ and a constant repetition rate of 500 Hz at 193 nm. A long-term test of this laser system was done. The output energy was constant over the test interval of 1.5 billion pulses. The pulse-to-pulse stability was constant over the total test period. The test was done without changing or cleaning the resonator optics.

Citation Download Citation

Andreas Goertler, C. Hartmann, and C. Strowitzki "Results of a long-term test of an ArF mini-excimer laser", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); https://doi.org/10.1117/12.515516

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available