Automated system for interferometric out-of-plane and in-plane microelements measurement

Jacek Marcin Kacperski; Tomasz Sykula; Malgorzata Kujawinska; Leszek A. Salbut

doi:10.1117/12.531537

24 October 2003 Automated system for interferometric out-of-plane and in-plane microelements measurement

Jacek Marcin Kacperski, Tomasz Sykula, Malgorzata Kujawinska, Leszek A. Salbut

Proceedings Volume 5125, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments; (2003) https://doi.org/10.1117/12.531537
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2002, 2002, Wilga, Poland

Abstract

The automated system for microelement testing, which consists of Twyman-Green interferometer and waveguide grating interferometer integrated with optical microscope is presented. The microsocpe is additionally equipped with mechanisms to fix, microposition and load a specimen under study. Full-field analysis of out-of-plane and in-plane displacements of microelements is performed at this study. The applicability of the system is proven by performing test of silicon membrane and silicon beam.

Citation Download Citation

Jacek Marcin Kacperski, Tomasz Sykula, Malgorzata Kujawinska, and Leszek A. Salbut "Automated system for interferometric out-of-plane and in-plane microelements measurement", Proc. SPIE 5125, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, (24 October 2003); https://doi.org/10.1117/12.531537

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