Characteristic energy loss spectra of metal-silicon surface phases

Yu. V. Luniakov; Victor G. Lifshits

doi:10.1117/12.502392

17 June 2003 Characteristic energy loss spectra of the metal-silicon surface phases

Yu. V. Luniakov, Victor G. Lifshits

Proceedings Volume 5129, Fundamental Problems of Optoelectronics and Microelectronics; (2003) https://doi.org/10.1117/12.502392
Event: Fundamental Problems of Optoelectronics and Microelectronics, 2002, Vladivostok, Russian Federation

Abstract

Energy loss spectra of the ordered and disordered metal-silion surface phases available in literature are collected and analyzed. The ordered surface phases are shown to demonstrate energy loss features that are different from those of the clean metal and silicon. These features can be an indication of the formation of corresponding surface phase. The method of characteristic energy losses can be used for identification of the disordered surface phases that cannot be detected by conversional LEED of RHEED methods. One of the examples is disordered Si(111) √3 × √7-In surface phase that can be detected only by characteristic EELS peak near 13.5 eV.

Citation Download Citation

Yu. V. Luniakov and Victor G. Lifshits "Characteristic energy loss spectra of the metal-silicon surface phases", Proc. SPIE 5129, Fundamental Problems of Optoelectronics and Microelectronics, (17 June 2003); https://doi.org/10.1117/12.502392

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