New concepts in scatterometric investigations of crystalline boules

Andrzej L. Bajor; Wieslaw Chabros

doi:10.1117/12.518745

22 October 2003 New concepts in scatterometric investigations of crystalline boules

Andrzej L. Bajor, Wieslaw Chabros

Proceedings Volume 5136, Solid State Crystals 2002: Crystalline Materials for Optoelectronics; (2003) https://doi.org/10.1117/12.518745
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

In this paper we present our novel concept in bulk scatterometry of single crystals. A certain primary investigations have revealed both the polarizing and depolarizing properties of real defects. These phenomena are believed to have considerable influence on defects recognition in a future device proposed here. Apart of the linear polarizer on the input beam, and the adequate linear analyzers in the scattered light beams, a computer-driven monochromator will be used for revealing defects of different dimensions, thanks to the relation between the intensity of the scattered light and the wavelength. By using such a monochromator and the computer techniques, one should be able to plot 2-D and 3-D maps of crytalline defects, as well as an intenisty of scattered light as a function of wavelength for different points in the crystal.

Citation Download Citation

Andrzej L. Bajor and Wieslaw Chabros "New concepts in scatterometric investigations of crystalline boules", Proc. SPIE 5136, Solid State Crystals 2002: Crystalline Materials for Optoelectronics, (22 October 2003); https://doi.org/10.1117/12.518745

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