Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements

Fredrik K. Nikolajeff; Olle Larsson; Sverker Hard; Maria Kindlundh

doi:10.1117/12.509971

10 November 2003 Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements

Fredrik K. Nikolajeff, Olle Larsson, Sverker Hard, Maria Kindlundh

Proceedings Volume 5177, Gradient Index, Miniature, and Diffractive Optical Systems III; (2003) https://doi.org/10.1117/12.509971
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We demonstrate a novel type of self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements. The self-alignment is achieved by connecting micro-structures which have originally been formed in silicon and later replicated in concave and convex forms. V-grooves hold the optical fibers and the light is coupled out through diffractive optical elements (DOEs). A manufacturing process has been developed which allows both deep micro-structures (V-grooves and alignment structures) and shallow surface reliefs (diffractive elements) to be realized on the same substrate. The self-alignment using microstructures allows a positioning accuracy of about ±5μm. Two different fan-out DOEs have been optically characterized.

Citation Download Citation

Fredrik K. Nikolajeff, Olle Larsson, Sverker Hard, and Maria Kindlundh "Self-aligned optofiber/waveguide connector with integrated V-grooves and diffractive optical elements", Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); https://doi.org/10.1117/12.509971

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