Image detection system for 157 nm using fluorescent glass

Yukitoshi Otani; Masakatsu Takahashi; Lianhua Jin; Hiroyuki Kowa; Norihiro Umeda

doi:10.1117/12.506755

4 November 2003 Image detection system for 157-nm using fluorescent glass

Yukitoshi Otani, Masakatsu Takahashi, Lianhua Jin, Hiroyuki Kowa, Norihiro Umeda

Proceedings Volume 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies; (2003) https://doi.org/10.1117/12.506755
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

An image detection system for vacuum ultra-violet region used a F2 laser (157nm) as a light source is proposed. A fluorescent glass (LUMILASS-G9) is employed to convert UV light into visible light. Characteristics of fluorescent glass are studied. Some beam profiles of F2 laser are analyzed as a demonstration of the imaging detection. A VUV interferometer is proposed.

Citation Download Citation

Yukitoshi Otani, Masakatsu Takahashi, Lianhua Jin, Hiroyuki Kowa, and Norihiro Umeda "Image detection system for 157-nm using fluorescent glass", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); https://doi.org/10.1117/12.506755

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