Pitch calibration by reflective laser diffraction

Chao-Jung Chen; Shen-Peng Pan; Liang-Chih Chang; Gwo-Sheng Peng

doi:10.1117/12.505559

20 November 2003 Pitch calibration by reflective laser diffraction

Chao-Jung Chen, Shen-Peng Pan, Liang-Chih Chang, Gwo-Sheng Peng

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.505559
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The pitch calibration by a single wavelength laser and Littrow configuration laser diffractometer was presented. The calibration system consists of a green He-Ne laser, a precision angular positioning state, a four-quadrant detector, a beam splitter, and some optics. The measurement principles was based on the Littrow configuation that the reflective diffraction beam coincides with the incident beam. The pitch value was determined by the diffraction angle α and laser wavelength λ. A pitch standard, with nominal value of 292 nm, was measured by a wavelength of 543 nm green He-Ne laser diffractometer. The average pitch value was 292.10 nm. According to the "Guide to the expression of uncertainty in measurement", the system uncertainty was evaluated. The error sources included laser wavelength, refractive index of air, angular state, temperature, and coefficient of thermal expansion. The expanded uncertainty was 0.03 nm at a confidence level of 95% and 15 degrees of freedom. The main contributor of uncertainy was the positioning deviation of angular stage. Although the laser diffractometer had a high-accuracy ability, the measurement capability of Laser diffractometer was limited by the laser wavelength. The pitch p should be large than a half of laser wavelength.

Citation Download Citation

Chao-Jung Chen, Shen-Peng Pan, Liang-Chih Chang, and Gwo-Sheng Peng "Pitch calibration by reflective laser diffraction", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.505559

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available