Ultrahigh resolution absolute Cartesian electronic autocollimator

Douglas B. Leviton

doi:10.1117/12.518377

20 November 2003 Ultrahigh resolution absolute Cartesian electronic autocollimator

Douglas B. Leviton

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.518377
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The development of a compact, ultra-high resolution, electronic autocollimator with excellent readout stability, linearity, and coordinate orthogonality is presented. This optical metrology tool relies on new advances in Cartesian optical encoders based on pattern recognition technology. Readout instabilities characteristic of conventional electronic autocollimators whose lateral effect photodetectors and operational amplifiers exhibit temporal and thermal drifts, are absent in this new technology. An autocollimator with a form factor similar to conventional alignment telescopes has been demonstrated with an angular resolution of 0.02 arcseconds peak-to-peak and less than 0.01 arcseconds rms. Various optical metrology applications for the laboratory and for space flight, including cryostatic ones, are described.

Citation Download Citation

Douglas B. Leviton "Ultrahigh resolution absolute Cartesian electronic autocollimator", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.518377

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