EUV collectors: design, development, fabrication, and testing

Wilhelm J. Egle; Wolfgang Hafner; Axel Matthes; Eral Erzin; Bernhard Gaenswein; Herbert Schwarz; Piotr Marczuk; Martin Antoni; Wolfgang Singer; Frank Melzer; Joachim Hainz

doi:10.1117/12.507736

13 January 2004 EUV collectors: design, development, fabrication, and testing

Wilhelm J. Egle, Wolfgang Hafner, Axel Matthes, Eral Erzin, Bernhard Gaenswein, Herbert Schwarz, Piotr Marczuk, Martin Antoni, Wolfgang Singer, Frank Melzer, Joachim Hainz

Author Affiliations +

Proceedings Volume 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications; (2004) https://doi.org/10.1117/12.507736
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

EUV sources are designed to emit radiation around 13.5 nm wavelength into a solid angle of up to 2π sr. With a suitable Wolter type 1 grazing incidence optic such EUV photons can be collected with high efficiency and focussed onto a preferred target. Such Wolter type 1 collectors are characterized by densely nested concentric and confocal mirror shells with fixed distance from the source and the intermediate image. In this paper we will report on optical and mechanical design, development, fabrication and testing of nested Wolter type 1 collectors, capable of collecting and imaging EUV photons at 13.5 nm wavelength with high efficiency.

Citation Download Citation

Wilhelm J. Egle, Wolfgang Hafner, Axel Matthes, Eral Erzin, Bernhard Gaenswein, Herbert Schwarz, Piotr Marczuk, Martin Antoni, Wolfgang Singer, Frank Melzer, and Joachim Hainz "EUV collectors: design, development, fabrication, and testing", Proc. SPIE 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, (13 January 2004); https://doi.org/10.1117/12.507736

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