Design of a production process to enhance optical performance of 3w optics

Rahul R. Prasad; Justin R. Bruere; John M. Halpin; Phil Lucero; Steven Mills; Michael Bernacil; Richard P. Hackel

doi:10.1117/12.523857

10 June 2004 Design of a production process to enhance optical performance of 3ω optics

Rahul R. Prasad, Justin R. Bruere, John M. Halpin, Phil Lucero, Steven Mills, Michael Bernacil, Richard P. Hackel

Author Affiliations +

Proceedings Volume 5273, Laser-Induced Damage in Optical Materials: 2003; (2004) https://doi.org/10.1117/12.523857
Event: XXXV Annual Symposium on Optical Materials for High Power Lasers: Boulder Damage Symposium, 2003, Boulder, Colorado, United States

Abstract

Using the Phoenix pre-production conditioning facility we have shown that raster scanning of 3ω optics using a XeF excimer laser and mitigation of the resultant damage sites with a CO₂ laser can enhance their optical damage resistance. Several large-scale (43 cm x 43 cm) optics have been processed in this facility. A production facility capable of processing several large optics a week has been designed based on our experience in the pre-production facility. The facility will be equipped with UV conditioning lasers -- 351-nm XeF excimer lasers operating at 100 Hz and 23 ns. The facility will also include a CO₂ laser for damage mitigation, an optics stage for raster scanning large-scale optics, a damage mapping system (DMS) that images large-scale optics and can detect damage sites or precursors as small as ≈15 μm, and two microscopes to image damage sites with ≈5 μm resolution. The optics will be handled in a class 100 clean room, within the facility that will be maintained at class 1000.

Citation Download Citation

Rahul R. Prasad, Justin R. Bruere, John M. Halpin, Phil Lucero, Steven Mills, Michael Bernacil, and Richard P. Hackel "Design of a production process to enhance optical performance of 3ω optics", Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); https://doi.org/10.1117/12.523857

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