A MEMS-based correlation radiometer

Michael B. Sinclair; Kent B Pfeifer; Michael A Butler; Stephen D. Senturia; Erik R. Deutsch; Dan Youngner; Eugen Cabuz; G. Benjamin Hocker

doi:10.1117/12.536306

24 January 2004 A MEMS-based correlation radiometer

Michael B. Sinclair, Kent B Pfeifer, Michael A Butler, Stephen D. Senturia, Erik R. Deutsch, Dan Youngner, Eugen Cabuz, G. Benjamin Hocker

Author Affiliations +

Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004) https://doi.org/10.1117/12.536306
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

We describe the development of a MEMS-based correlation radiometer for remote detection of chemical species. The radiometer utilizes a new type of MEMS programmable diffraction grating called the Polychromator. The Polychromator contains an array of 1024 electrostatically actuated reflective beams that are 10 microns wide by 1 cm long, and have a vertical travel of approximately 2 - 4 microns. The Polychromator grating is used to replace the reference cell of conventional correlation radiometry. Appropriate programming of the deflection profile of the grating array enables the production of any spectral transfer function desired for the correlation measurement. Advantages of this approach to correlation radiometry include the ability to detect multiple chemical species with a compact instrument, the ability to optimize the reference spectra to eliminate chemical interferences, and the ability to produce reference spectra for hazardous and transient species.

Citation Download Citation

Michael B. Sinclair, Kent B Pfeifer, Michael A Butler, Stephen D. Senturia, Erik R. Deutsch, Dan Youngner, Eugen Cabuz, and G. Benjamin Hocker "A MEMS-based correlation radiometer", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); https://doi.org/10.1117/12.536306

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