Analytical approach for characterization of sputtered thin film microthermocouples (STFMT)

Muhammad Imran; Abhijit Bhattacharyya

doi:10.1117/12.539820

29 July 2004 Analytical approach for characterization of sputtered thin film microthermocouples (STFMT)

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.539820
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

This paper describes an analytical approach for the characterization of sputtered thin film microthermocouples (STFMT) to determine the thermophysical properties of microstructures. A complete spatially one-dimensional (1D) boundary value problem with a thin film sputtered sample sandwiched between an heater/RTD (Resistance Temperature Detector) at its one end and the thin film microthermocouple at its other end has been solved to show the effects of various thermoelements on Seebeck voltage, heat loss/gain effects between the device & the environment, as well as at the contact area between the sample and microthermocouple tip. An interesting outcome for three different pairs of thermoelements studied (one material is always Titanium, and the other is Chromium, Chromium-Silicide and Tantalum, in turn) is that higher the Seebeck voltage of the microthermocouples under consideration, less accurate is the temperature sensed by it.

Citation Download Citation

Muhammad Imran and Abhijit Bhattacharyya "Analytical approach for characterization of sputtered thin film microthermocouples (STFMT)", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.539820

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