Distributed MEMS-microvalves-suitable structure for improving performances of intelligent pneumatic two-dimensional microconveyer

Yves-Andre Chapuis; Yamato Fukuta; Yoshio Mita; Hiroyuki Fujita

doi:10.1117/12.539683

29 July 2004 Distributed MEMS-microvalves-suitable structure for improving performances of intelligent pneumatic two-dimensional microconveyer

Yves-Andre Chapuis, Yamato Fukuta, Yoshio Mita, Hiroyuki Fujita

Author Affiliations +

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.539683
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

In this paper, a design approach was proposed to define suitable structures of distributed controlled MEMS used in a pneumatic two-dimensional microconveyance system. After an introduction to distributed systems, a brief survey of their applications in the field of micromanipulation and prospect in industrial microfabrication was presented. Afterward, the authors introduced the notion of intelligent motion surface used in the field of pneumatic microconveyance. They analyzed suitable distributed structures based on elementary microconveyance, which are supposed to provide an appropriate air-flow force and overcome microfluidic problems. The first microconveyer prototype was fabricated by using bulk micromachining technique. It was developed to estimate MEMS density required to produce an elementary force to convey a micro-object. Then, a specific distributed structure was proposed to develop the pneumatic two-dimensional microconveyer device. The device size is 35 x 35 mm² for 560 MEMS-microvalves, controlled by distributed arrays and processed by a centralized intelligence via a microprocessor. From experimental conveyance results, we can conclude to the feasibility of the pneumatic microconveyance by distributed air-flow microactuators.

Citation Download Citation

Yves-Andre Chapuis, Yamato Fukuta, Yoshio Mita, and Hiroyuki Fujita "Distributed MEMS-microvalves-suitable structure for improving performances of intelligent pneumatic two-dimensional microconveyer", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.539683

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