Paper
29 July 2004 Enhancement of miniature and small-bandwidth micromachined antennas using GaAs technology
Sunghae Jung, Junghwan Hwang, Sungweon Kang
Author Affiliations +
Abstract
Micromachined antennas have been fabricated on GaAs substrates with the thickness of 100 μm. The patch size of a half-wavelength rectangular-shaped antenna has been reduced about 63.8% by fabricating a folded slot antenna with shorting pins. A quarter-wavelength rectangular shaped antenna and the folded slot antenna on COB show the bandwidth of 300 MHz and 350 MHz, respectively and the quarter wavelength antenna on a MLF package presents the bandwidth of 400 MHz. The bandwidth and antenna gain of the half-wavelength antenna, the quarter- wavelength rectangular shaped antenna, and the folded slot antenna have been measured on COB. For the MLF package, the quarter- wavelength rectangular shaped antenna has only been studied
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sunghae Jung, Junghwan Hwang, and Sungweon Kang "Enhancement of miniature and small-bandwidth micromachined antennas using GaAs technology", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.538598
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KEYWORDS
Antennas

Gallium arsenide

Gold

Prototyping

Coating

Etching

Sapphire

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