Nanofabrication of solid materials with ultraviolet femtosecond pulses

Jan-Hendrik Klein-Wiele; Jozsef Bekesi; Juergen Ihlemann; Peter Simon

doi:10.1117/12.552805

2 April 2004 Nanofabrication of solid materials with ultraviolet femtosecond pulses

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, Juergen Ihlemann, Peter Simon

Proceedings Volume 5399, Laser-Assisted Micro- and Nanotechnologies 2003; (2004) https://doi.org/10.1117/12.552805
Event: Laser-Assisted Micro- and Nanotechnologies 2003, 2003, St. Petersburg, Russian Federation

Abstract

Surface treatment of metals and other materials is studied using sub-picosecond laser pulses at 248 nm. The advantage of the combination of femtosecond pulse durations with ultraviolet wavelengths is pointed out. Full utilization of the specific pulse parameters for nano-scale material processing is demonstrated. Imaging techniques combined with diffractive optical elements are exploited for the generation of two dimensional periodic structures. Superior quality and feature sizes below 100 nm are achieved. The ultra-short pulse UV laser system applied for surface texturing comprises a Ti:Sapphire front-end system and a specially developed excimer amplifier module generating 300 fs pulses at 248 nm with an average power of ~10 W. The excimer module operating at 300 Hz together with a newly introduced beam smoothing technique allows high precision texturing of large surfaces opening up new possibilities in industrial applications.

Citation Download Citation

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, Juergen Ihlemann, and Peter Simon "Nanofabrication of solid materials with ultraviolet femtosecond pulses", Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); https://doi.org/10.1117/12.552805

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