Paper
18 August 2004 Characterization and design of optical integrated devices for optical clock distribution network
Nicolas Schnell, Matthieu Martin, Regis Orobtchouk, Taha Benyattou, Robert Perrin, Pierre R. Labeye, Jean-Marc Fedeli
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Abstract
The design and characterization of very compact passive devices based on Silicon On Insulator (SOI) are investigated. Our devices have been realised on 8 inch wafer at CEA LETI using microelectronics technology for the demonstration of an optical clock distribution. We have studied strip waveguide of 0.3μm width and 0.38 μm in height, Y junctions, MMI splitters and two kinds of microbends with constant or progressive radius of curvature.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nicolas Schnell, Matthieu Martin, Regis Orobtchouk, Taha Benyattou, Robert Perrin, Pierre R. Labeye, and Jean-Marc Fedeli "Characterization and design of optical integrated devices for optical clock distribution network", Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); https://doi.org/10.1117/12.563287
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Cited by 1 scholarly publication.
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KEYWORDS
Waveguides

Silicon

Electron beam lithography

Brain-machine interfaces

Integrated optics

Lithography

Silicon films

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