Compact triangulation distance sensor realized by wafer bending technique

Minoru Sasaki; Satoshi Endou; Kazuhiro Hane

doi:10.1117/12.545267

16 August 2004 Compact triangulation distance sensor realized by wafer bending technique

Minoru Sasaki, Satoshi Endou, Kazuhiro Hane

Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.545267
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The triangulation distance sensor is constructed using the originally proposed wafer bending technique. Since the bending process is final in the fabrication sequence, the planer photolighography can be combined. On the Si wafer, the elements are pre-aligned at the unfolded planer condition. The position sensitive detector (PSD), mirror, and alignment pit for the collimation ball lens are prepared. The realized sensor substrate is 1.4mm in depth. Taking the advantage of the batch fabrication, 2x2 sensor array is prepared. The dynamic range of 4mm with ± 1% noise is confirmed.

Citation Download Citation

Minoru Sasaki, Satoshi Endou, and Kazuhiro Hane "Compact triangulation distance sensor realized by wafer bending technique", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.545267

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Semiconducting wafers

Mirrors

Geometrical optics

Silicon

Electrodes

Beam propagation method

Show All Keywords

Keywords/Phrases

Search In:

Publication Years