New optical control system for precision and fine laser drilling device

Takeji Arai; Toshiaki Yamaguchi

doi:10.1117/12.554278

1 September 2004 New optical control system for precision and fine laser drilling device

Takeji Arai, Toshiaki Yamaguchi

Proceedings Volume 5456, Photon Management; (2004) https://doi.org/10.1117/12.554278
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

A position difference from a theoretical one by ray tracing on the imaging plane has taken place due to a distortion by using f θ lens in this optical system, which has been able to be compensated by returning a correction value acquired from accurate theoretical calculations to the control system. This paper will describe the system and control of this equipment.

Citation Download Citation

Takeji Arai and Toshiaki Yamaguchi "New optical control system for precision and fine laser drilling device", Proc. SPIE 5456, Photon Management, (1 September 2004); https://doi.org/10.1117/12.554278

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