N-lambda speckle-interferometry for contouring in industrial applications

Andreas Purde; Andreas Meixner; Katharina Bachfischer; Thomas Zeh; Philipp Kirilenko; Alexander W. Koch

doi:10.1117/12.545706

10 September 2004 N-lambda speckle-interferometry for contouring in industrial applications

Andreas Purde, Andreas Meixner, Katharina Bachfischer, Thomas Zeh, Philipp Kirilenko, Alexander W. Koch

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.545706
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

In some specific applications the electronic speckle pattern interferometry (ESPI) is superior to other optical surface metrology methods. The two-wavelength ESPI for surface contouring can achieve both high accuracy of height resolution in the micron range and short measurement times far below a second. A further advantage of this method is that compared to e.g. triangulation, illumination axis and observation axis can be identical. A problem of interferometric methods in general are phase ambiguities originating from discontinuous measurement object surfaces. A common idea to decrease the range of ambiguity is the fusion of several interferograms recorded at different wavelengths. This paper presents a concept for a loss free sequential superposition of several spatially separated laser beams as well as algorithms for the determination of measured surface discontinuities. Also a solution of a stability control for fast wavelength tuning of laser diodes is presented.

Citation Download Citation

Andreas Purde, Andreas Meixner, Katharina Bachfischer, Thomas Zeh, Philipp Kirilenko, and Alexander W. Koch "N-lambda speckle-interferometry for contouring in industrial applications", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.545706

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