Evolutionary approach to an inverse problem in near-field optics microscopy

Demetrio Macias; Dominique Barchiesi; Alexandre Vial

doi:10.1117/12.545793

17 August 2004 Evolutionary approach to an inverse problem in near-field optics microscopy

Demetrio Macias, Dominique Barchiesi, Alexandre Vial

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.545793
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

In the present work we employ an heuristic method based on evolutionary algorithms for the solution of an inverse problem in near-field optics. The input for the inversion procedure are some of the experimental data that appear in reference 1. In addition, we make use of the direct model proposed in that reference for the iterative solution of the direct problem. This requirement is directly related to the nature of the evolutionary approach employed. We show the possibility to recover, with a high degree of confidence, some parameters of the sample that originated the experimental information. The usefulness of the inverse method is therefore obvious if the recorded data have to be used for metrologic purpose.

Citation Download Citation

Demetrio Macias, Dominique Barchiesi, and Alexandre Vial "Evolutionary approach to an inverse problem in near-field optics microscopy", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545793

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