Fabrication of micro-optical elements and biochip patterns on glass surface by imprint lithography

Yasuhisa Tsubouchi; Takehiko Yamaguchi; Kazuyuki Yao; Seiichiro Kitagawa; Yoshihiko Hirai

doi:10.1117/12.560144

8 October 2004 Fabrication of micro-optical elements and biochip patterns on glass surface by imprint lithography

Yasuhisa Tsubouchi, Takehiko Yamaguchi, Kazuyuki Yao, Seiichiro Kitagawa, Yoshihiko Hirai

Proceedings Volume 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices; (2004) https://doi.org/10.1117/12.560144
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Fabrications of free form surface and well array plate demonstrated using glass material by imprint lithography. A metal mold is processed by a Diamond cutting. Using a low Tg glass plate, the mold is pressed to the glass surface and transferred the free form surface. The feature error of the proceed glass surface is within 200nm in 3mm x 6mm field. On the other hand, deep well array for bio-chemical device is transferred on glass surface using ceramics mold. Micro wells with 200 x 200μm in square and 50 μm in depth is achieved without fatal defect using optimized imprint process conditions.

Citation Download Citation

Yasuhisa Tsubouchi, Takehiko Yamaguchi, Kazuyuki Yao, Seiichiro Kitagawa, and Yoshihiko Hirai "Fabrication of micro-optical elements and biochip patterns on glass surface by imprint lithography", Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); https://doi.org/10.1117/12.560144

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