Improved polarization ray tracing of thin-film optical coatings

Joachim Wesner; Frank Eisenkramer; Joachim Heil; Thomas Sure

doi:10.1117/12.559971

22 October 2004 Improved polarization ray tracing of thin-film optical coatings

Joachim Wesner, Frank Eisenkramer, Joachim Heil, Thomas Sure

Proceedings Volume 5524, Novel Optical Systems Design and Optimization VII; (2004) https://doi.org/10.1117/12.559971
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Thin-film coatings in modern optical systems as wideband AR-coatings may have >10 layers and an optical thickness of several λ. Such complex thin-films may introduce pronounced changes in transmission phases with varying angles of incidence, polarization and/or wavelength. "Polarization ray tracing" as utilized by current optical design programs models a "ray" as a "localized plane wave" hitting the air/thin-film/glass system and the transmission properties in phase and amplitude for the p- and s-components are taken into account. However, this only approximates the thin film as a pure phase object of vanishing thickness on a flat surface. Any "ray" crossing a layer of finite thickness will undergo lateral displacement and on a surface of notable curvature, this displacement will further change the direction of the refracted "ray". Both effects might become important in high NA, deep UV microscope objectives based on an air-spaced design that involves a large number of highly curved air/glass interfaces, large angles of incidence and tight tolerances. This paper shows how the equivalent lateral ray displacement and bending can be calculated from the film/glass properties and the surface curvature and how it can be incorporated into a polarization ray-tracing program. It also addresses other problems encountered in polarization ray tracing of thin films, as proper conversion from phase shifts to optical path length and how to easily "unwrap" the thin-film induced phase.

Citation Download Citation

Joachim Wesner, Frank Eisenkramer, Joachim Heil, and Thomas Sure "Improved polarization ray tracing of thin-film optical coatings", Proc. SPIE 5524, Novel Optical Systems Design and Optimization VII, (22 October 2004); https://doi.org/10.1117/12.559971

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available