Nano-optical devices and integration based on nanopattern replications and nanolithography

Jian Jim Wang; Lei Chen; Stephen-W. Tai; Xuegong Deng; Paul F. Sciortino; Feng Liu; Jiandong Deng; Xiaoming Liu; Anguel Nikolov; Dino Sinatore

doi:10.1117/12.570040

19 January 2005 Nano-optical devices and integration based on nanopattern replications and nanolithography

Jian Jim Wang, Lei Chen, Stephen-W. Tai, Xuegong Deng, Paul F. Sciortino, Feng Liu, Jiandong Deng, Xiaoming Liu, Anguel Nikolov, Dino Sinatore

Author Affiliations +

Proceedings Volume 5592, Nanofabrication: Technologies, Devices, and Applications; (2005) https://doi.org/10.1117/12.570040
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

We developed a nano-manufacturing platform based on wafer level nano-replication with mold and nano-pattern transfer by nano-lithography. The nano-replication process, which based on imprinting a single-layer spin-coated UV curable resist, achieved excellent nano-patterning fidelity and on-wafer uniformity with high-throughput. Nano-optic devices, such as, quarter wave plates and polarizers, were manufactured with the nano-manufacturing platform. Excellent wafer level performance and yield were achieved. The developed technology is suitable for high-throughput and low cost manufacturing needs for commercializing nano-structure based optical devices and integrated optical devices.

Citation Download Citation

Jian Jim Wang, Lei Chen, Stephen-W. Tai, Xuegong Deng, Paul F. Sciortino, Feng Liu, Jiandong Deng, Xiaoming Liu, Anguel Nikolov, and Dino Sinatore "Nano-optical devices and integration based on nanopattern replications and nanolithography", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); https://doi.org/10.1117/12.570040

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available