Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors

Ashtosh Ganjoo; Himanshu Jain; Joseph V. Ryan; Renbo Song; Rima Chanda; Joseph Irudayaraj; Yujie Ding; Carlo G. Pantano

doi:10.1117/12.573900

29 December 2004 Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors

Ashtosh Ganjoo, Himanshu Jain, Joseph V. Ryan, Renbo Song, Rima Chanda, Joseph Irudayaraj, Yujie Ding, Carlo G. Pantano

Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.573900
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe₂ as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.

Citation Download Citation

Ashtosh Ganjoo, Himanshu Jain, Joseph V. Ryan, Renbo Song, Rima Chanda, Joseph Irudayaraj, Yujie Ding, and Carlo G. Pantano "Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); https://doi.org/10.1117/12.573900

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