Physical theory of Ronchi-grams unequal strip-widths rulings

N. I. Toto-Arellano; Gustavo Rodriguez Zurita; Alejandro Cornejo-Rodriguez

doi:10.1117/12.592208

21 October 2004 Physical theory of Ronchi-grams unequal strip-widths rulings

N. I. Toto-Arellano, Gustavo Rodriguez Zurita, Alejandro Cornejo-Rodriguez

Proceedings Volume 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications; (2004) https://doi.org/10.1117/12.592208
Event: 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, 2004, Porlamar, Venezuela

Abstract

In this paper we inspect some further properties of diffraction Ronchi rulings and its effects in Ronchigrams. Our considerations are based on the physical theory of gratings with different strip-widths geometry. Under scope are absorptive gratings, phase gratings and mixed gratings. The presented analysis and respective results are illustrated here with the use of an advanced mathematics software pack. Some possible applications in optical testing, imaging processing and nanolithography are considered.

Citation Download Citation

N. I. Toto-Arellano, Gustavo Rodriguez Zurita, and Alejandro Cornejo-Rodriguez "Physical theory of Ronchi-grams unequal strip-widths rulings", Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); https://doi.org/10.1117/12.592208

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