Preparation of homogeneous ZrO2 films

Dawei Zhang; Meiqiong Zhan; Weidong Gao; Shuzhen Shang; Yingjian Wang; Jianda Shao; Zhengxiu Fan

doi:10.1117/12.571035

10 January 2005 Preparation of homogeneous ZrO₂ films

Dawei Zhang, Meiqiong Zhan, Weidong Gao, Shuzhen Shang, Yingjian Wang, Jianda Shao, Zhengxiu Fan

Proceedings Volume 5623, Passive Components and Fiber-based Devices; (2005) https://doi.org/10.1117/12.571035
Event: Asia-Pacific Optical Communications, 2004, Beijing, China

Abstract

Zirconium oxide films were prepared with and without ion beam assisted deposition (IBAD) by an electron beam. The effects of Ar-ion bombardment on the optical inhomogeneity of ZrO₂ films deposited at room temperature were investigated. The results show that all samples are amorphous, and the refractive index of sample A without IBAD randomly changed with the film thickness, while the relative inhomogeneity of samples B, C, D with IBAD nearly zero. It was found that the energy of depositing molecule or atom had an important effect on the optical inhomogeneity of films, and the optical inhomogeneity of amorphous ZrO2 films could be improved by IBAD.

Citation Download Citation

Dawei Zhang, Meiqiong Zhan, Weidong Gao, Shuzhen Shang, Yingjian Wang, Jianda Shao, and Zhengxiu Fan "Preparation of homogeneous ZrO₂ films", Proc. SPIE 5623, Passive Components and Fiber-based Devices, (10 January 2005); https://doi.org/10.1117/12.571035

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