Paper
23 December 2004 High-speed wavefront sensor based on position sensitive detectors (PSDs)
Author Affiliations +
Abstract
In view of the convenience and effectiveness of a position sensitive detector (PSD) in sensing the local distortion of a light beam wavefront, a high-speed wavefront sensor based on PSD array is proposed, fabricated and characterized. As a prototype of this kind of wavefront sensor it consists of a matrix of 4×4 tetra-lateral PSDs, and each PSD unit measures 500 μm×500 μm with a 300 μm interval between them. Each unit has 4 electrodes, which can be used for photocurrent output. The local distortion of a light beam wavefront can be deduced from those 4 photocurrents. Besides 64 electrodes of 16 element units, the sensor also has another common electrode that can be used in applying a reverse bias. Primary tests of the device show that it has low dark current, high spectral sensitivity, very fast response speed, and quite small crosstalk between its neighbouring units. The dark current of an element unit is less than 1 nA at a reverse bias of 20 V. The peak spectral sensitivity of the sensor is over 0.6 mA / mW at 900 nm wavelength. Its response time is about 10 ns at 45 V reverse bias, and the crosstalk between its neighbouring units is as low as 1.6% at λ= 650 nm and Ur = 5 V.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinjun Lin, Jiuyao Tang, and Haibin Chen "High-speed wavefront sensor based on position sensitive detectors (PSDs)", Proc. SPIE 5639, Adaptive Optics and Applications III, (23 December 2004); https://doi.org/10.1117/12.575504
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Wavefront sensors

Sensors

Capacitance

Electrodes

Wavefronts

Distortion

Etching

Back to Top