Research and development of cadmium zinc telluride substrates for mercury cadmium telluride epitaxial films

Hui Huang; Rui-min Wan; Zeng-lin Zhao; Quan-lin Yue; Rong-bin Ji; Shun-chen Pan

doi:10.1117/12.570660

10 January 2005 Research and development of cadmium zinc telluride substrates for mercury cadmium telluride epitaxial films

Hui Huang, Rui-min Wan, Zeng-lin Zhao, Quan-lin Yue, Rong-bin Ji, Shun-chen Pan

Author Affiliations +

Proceedings Volume 5640, Infrared Components and Their Applications; (2005) https://doi.org/10.1117/12.570660
Event: Photonics Asia, 2004, Beijing, China

Abstract

Cadmium zinc telluride (Cd_1-yZn_yTe) single crystals are important material for infrared detectors fabricating process and radiation detectors. Cd_1-yZn_yTe crystal wafers are widely used as substrate to grow epitaxial layers of mercury cadmium telluride (Hg_1-xCd_xTe) that is an important process for infrared detectors with high resolution. Especially, Cd_1-yZn_yTe with small concentrations (y=0.03~0.04) is favored for this purpose since the lattice constant of Cd_1-yZn_yTe (y=0.03~0.04) is close to that of Hg_0.8Cd_0.2Te, which has a bandgap corresponding to 10 micron. These applications impose certain requirements on the Cd_1-yZn_yTe crystals. Impurity concentrations should be low, especially for Cu, which can readily diffuse into the epitaxial layer and alter its electrical properties. Dislocation etch pit density should be low, typically no more than 1×10⁵ cm^-2. Infrared transmission should be high, usually greater than 60%, from 2.5 to 20 μm. Precipitates, visible as dark spots in infrared transmission microscopy, should be no larger than 10μm in diameter, and their density no higher than 0.5×10⁵~1×10⁵ cm^-2. This paper reports results on how these requirements can be met by our research and development works in Kunming institute of physics mainly through controlling the cadmium atmosphere pressure in the quartz ampoule.

Citation Download Citation

Hui Huang, Rui-min Wan, Zeng-lin Zhao, Quan-lin Yue, Rong-bin Ji, and Shun-chen Pan "Research and development of cadmium zinc telluride substrates for mercury cadmium telluride epitaxial films", Proc. SPIE 5640, Infrared Components and Their Applications, (10 January 2005); https://doi.org/10.1117/12.570660

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