Micromachining with ultrashort pulses of light

William G. Clark; Larry A. Walker II

doi:10.1117/12.601665

8 March 2005 Micromachining with ultrashort pulses of light

Proceedings Volume 5706, Critical Review: Industrial Lasers and Applications; (2005) https://doi.org/10.1117/12.601665
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Micromachining materials with ultrashort pulses of light offers a new modality for processing materials that can produce a low heat-affected zone, is not wavelength dependent, has reduced contamination, produces highly repeatable results shot-after-shot, can create both micron and nanometer scale features in materials and has the ability to machine just about anything. This article will provide an overview of the processes involved in micromachining with ultrafast lasers, show how they differ from traditional methods, and discuss the future of this important technology.

Citation Download Citation

William G. Clark and Larry A. Walker II "Micromachining with ultrashort pulses of light", Proc. SPIE 5706, Critical Review: Industrial Lasers and Applications, (8 March 2005); https://doi.org/10.1117/12.601665

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