Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Steve Olson; Bruce Altemus; Balasubramanian Sankaran; Natalya Tokranova; Robert Geer; James Castracane; Bai Xu

doi:10.1117/12.591024

22 January 2005 Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Steve Olson, Bruce Altemus, Balasubramanian Sankaran, Natalya Tokranova, Robert Geer, James Castracane, Bai Xu

Author Affiliations +

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.591024
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Micromachined cantilevers used as force probes in atomic force microscopy are extremely sensitive to a variety of environment factors such as acoustic noise, temperature and humidity. This unwanted interference can be exploited to produce highly sensitive systems with proper design and under precise conditions. In this paper, we report the development of a new generic process for the fabrication of a microprobe with integrated piezoresistive read-out and built-in piezoelectric actuators. The mechanical performance of cantilever probes of various dimensions was studied. The result from the Finite Element Analysis (FEA) was compared to the experimental results. Application of this probe in a nondestructive, general-purpose, near-field nanomechanical imaging system will be discussed.

Citation Download Citation

Steve Olson, Bruce Altemus, Balasubramanian Sankaran, Natalya Tokranova, Robert Geer, James Castracane, and Bai Xu "Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.591024

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