UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications

Ren Yang; Jing Jiang; Wanjun Wang; Wen Jin Meng

doi:10.1117/12.592640

22 January 2005 UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications

Ren Yang, Jing Jiang, Wanjun Wang, Wen Jin Meng

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.592640
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Techniques for fabricating high-aspect-ratio microscale structures (HARMS) are being investigated for wide-ranging applications. Microdevices employing metal-based HARMS are of particular interest for mechanical, electro-mechanical, and chemical applications. In many applications, HARMS with two or several distinct heights are necessary, the fabrication of which necessitates two-level or multi-level mold inserts. In addition, tapered mold inserts would help achieving easy insert-part separation. Here we report a process for fabricating two-level, tapered mold inserts by combining UV-lithography on SU-8 resist, one-step metal electrodeposition, polish and level, and SU-8 resist removal. Without tilt and rotation during the lithography process, tapered SU-8 plating molds are obtained by employing light diffraction during lithography and proper development procedures. The SU-8 resist removal process does not reduce its strength. Efficacy of this approach is demonstrated with a two-level insert prototype suitable for fabricating micro heat exchanger parts by compression micromolding.

Citation Download Citation

Ren Yang, Jing Jiang, Wanjun Wang, and Wen Jin Meng "UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.592640

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available