Paper
22 January 2005 Design and fabrication of multidirectional microbubble separator
Shih-Wen Lee, Shwin-Chung Wong
Author Affiliations +
Abstract
A micro bubble separator capable of multi-directional bubble exhaustion is designed, fabricated, and tested. The bubble separator fabricated by MEMS fabrication process includes a flat region and a microchannel region. In the flat region, there are a matrix of micro holes with hydrophobic inner surface. The microchannel region contains a set of alternating gas and liquid microchannels. Within the gas microchannels, microholes are further made. The liquid microchannels are hydrophilic, while the gas microchannels, and the micro holes therein are hydrophobic. This bubble separator was experimentally demonstrated to exhale bubbles in multiple directions successfully with fuel recycling capability. Such bubble separators are suitable to deal with the CO2 bubbles generated at the anode of a micro direct methanol fuel cell (μDMFC).
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shih-Wen Lee and Shwin-Chung Wong "Design and fabrication of multidirectional microbubble separator", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.587644
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Liquids

Carbon monoxide

Silicon

Capillaries

Coating

Microelectromechanical systems

Semiconducting wafers

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