Integrated optics devices for long-ranging surface plasmons: fabrication challenges and solutions

Greg A. Mattiussi; Nancy Lahoud; Robert Charbonneau; Pierre Berini

doi:10.1117/12.600788

22 January 2005 Integrated optics devices for long-ranging surface plasmons: fabrication challenges and solutions

Greg A. Mattiussi, Nancy Lahoud, Robert Charbonneau, Pierre Berini

Proceedings Volume 5720, Micromachining Technology for Micro-Optics and Nano-Optics III; (2005) https://doi.org/10.1117/12.600788
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

A review of the principal issues related to the fabrication of long-ranging surface plasmon metal waveguides (MWG's) and associated passive and active elements is presented. A discussion of the fabrication requirements for MWG devices is given, followed by examples of various challenges encountered in their fabrication along with associated solutions. The examples cover devices made in a range of materials, including glass, lithium niobate, and PLZT ferroelectrics. Finally, a view on future fabrication strategies is given.

Citation Download Citation

Greg A. Mattiussi, Nancy Lahoud, Robert Charbonneau, and Pierre Berini "Integrated optics devices for long-ranging surface plasmons: fabrication challenges and solutions", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); https://doi.org/10.1117/12.600788

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