EUV focus sensor: design and modeling

Kenneth A. Goldberg; Maureen E. Teyssier; J. Alexander Liddle

doi:10.1117/12.601522

6 May 2005 EUV focus sensor: design and modeling

Kenneth A. Goldberg, Maureen E. Teyssier, J. Alexander Liddle

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.601522
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

We describe performance modeling and design optimization of a prototype EUV focus sensor (FS) designed for use with existing 0.3-NA EUV projection-lithography tools. At 0.3-NA and 13.5-nm wavelength, the depth of focus shrinks to 150 nm increasing the importance of high-sensitivity focal-plane detection tools. The FS is a free-standing Ni grating structure that works in concert with a simple mask pattern of regular lines and spaces at constant pitch. The FS pitch matches that of the image-plane aerial-image intensity: it transmits the light with high efficiency when the grating is aligned with the aerial image laterally and longitudinally. Using a single-element photodetector, to detect the transmitted flux, the FS is scanned laterally and longitudinally so the plane of peak aerial-image contrast can be found. The design under consideration has a fixed image-plane pitch of 80-nm, with aperture widths of 12-40-nm (1-3 wave-lengths), and aspect ratios of 2-8. TEMPEST-3D is used to model the light transmission. Careful attention is paid to the annular, partially coherent, unpolarized illumination and to the annular pupil of the Micro-Exposure Tool (MET) optics for which the FS is designed. The system design balances the opposing needs of high sensitivity and high throughput opti-mizing the signal-to-noise ratio in the measured intensity contrast.

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Kenneth A. Goldberg, Maureen E. Teyssier, and J. Alexander Liddle "EUV focus sensor: design and modeling", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.601522

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KEYWORDS

Signal to noise ratio

Extreme ultraviolet

Nickel

Image transmission

Photomasks

Sensors

Optical design

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