Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

Cheng Luo; Anand Francis; Xinchuan Liu

doi:10.1117/12.600332

16 May 2005 Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape

Cheng Luo, Anand Francis, Xinchuan Liu

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.600332
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

In this work, an analytical relationship is derived for a doubly-clamped microbeam when it buckles after release from the substrate. In terms of the relationship, compressive residual stress in the doubly-clamped microbeam can be determined according to its buckled shape, allowing one to find the compressive residual stress directly without much experimental effort. This relationship has been used to determine compressive residual stresses in four types of doubly-clamped SiO₂ microbeams. In addition, four methods have been applied to find the elongations of these SiO₂ microbeams, and the corresponding results are compared. Finally, the residual stresses in doubly-clamped SiO₂ microbeams predicted according to the derived relationship are compared with those found in SiO₂ microcantilevers, and the results have a good match.

Citation Download Citation

Cheng Luo, Anand Francis, and Xinchuan Liu "Determination of compressive residual stress in a doubly clamped microbeam according to its buckled shape", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.600332

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