Laser drilling of AIN ceramics using nanosecond pulses

Nikolay N. Nedialkov; Peter A. Atanasov; M. Sawczak; Gerard Sliwinski

doi:10.1117/12.611043

23 March 2005 Laser drilling of AIN ceramics using nanosecond pulses

Nikolay N. Nedialkov, Peter A. Atanasov, M. Sawczak, Gerard Sliwinski

Proceedings Volume 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2005) https://doi.org/10.1117/12.611043
Event: XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2004, Prague, Czech Republic

Abstract

Laser drilling of aluminum nitride (AIN) ceramics by 6 ns SHG (λ=532 nm) Nd:YAG laser pulses is studied. The drilling rate, quality of the holes, and the effects related to plasma formation are investigated. Numerical model based on the heat-transfer equation is developed to describe the drilling process. Different mechanisms of material decomposition are found to be realized, which depend on the laser fluence. They determine the quality of the holes produced. Below 5 GW/cm² the material ejection is realized by decomposition of ceramics into solid or liquid Al and gaseous N₂. The letter blows away culsters and flakes from the irradiated area and the holes drilled have irregular shape. At higher laser intensities, the decomposition into gaseous Al and N₂ or direct evaporation of the ceramics results in good hole quality. A saturation of the ablation rate as a function of the laser intensity is observed above 15 GW/cm². The calculated depths of the holes drilled are in agreement with the experimental data when absorption of the laser radiation from the plasma plume is taken into account.

Citation Download Citation

Nikolay N. Nedialkov, Peter A. Atanasov, M. Sawczak, and Gerard Sliwinski "Laser drilling of AIN ceramics using nanosecond pulses", Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); https://doi.org/10.1117/12.611043

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