InAs/(GaIn)Sb short-period superlattices for focal plane arrays

Robert Rehm; Martin Walther; Johannes Schmitz; Joachim Fleissner; Frank Fuchs; Wolfgang Cabanski; Johann Ziegler

doi:10.1117/12.603420

31 May 2005 InAs/(GaIn)Sb short-period superlattices for focal plane arrays

Robert Rehm, Martin Walther, Johannes Schmitz, Joachim Fleissner, Frank Fuchs, Wolfgang Cabanski, Johann Ziegler

Proceedings Volume 5783, Infrared Technology and Applications XXXI; (2005) https://doi.org/10.1117/12.603420
Event: Defense and Security, 2005, Orlando, Florida, United States

Abstract

An infrared camera based on a 256x256 focal plane array for the Mid-IR spectral range (3-5 μm) has been realized for the first time with InAs/GaSb short-period superlattices. The detector shows a cut-off wavelength of 5.4 μm and reveals a quantum efficiency of 30%. The noise equivalent temperature difference (NETD) reaches 9.4 mK at 73 K with F/2 optics and 6.5 ms integration time. Excellent thermal images with low NETD values and a very good modulation transfer function are presented. Furthermore, a new method to passivate InAs/GaInSb superlattice photodiodes for the 8-10 μm regime is demonstrated. The approach is based on the epitaxial overgrowth of wet-etched mesa diodes using lattice matched AlGaAsSb. A complete suppression of surface leakage currents in small sized test diodes with 70 μm diameter is observed.

Citation Download Citation

Robert Rehm, Martin Walther, Johannes Schmitz, Joachim Fleissner, Frank Fuchs, Wolfgang Cabanski, and Johann Ziegler "InAs/(GaIn)Sb short-period superlattices for focal plane arrays", Proc. SPIE 5783, Infrared Technology and Applications XXXI, (31 May 2005); https://doi.org/10.1117/12.603420

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