Broad band infrared spectroscopy of grooved silicon

E. Yu. Krutkova; V. Yu. Timoshenko; L. A. Golovan; P. K. Kashkarov; E. V. Astrova; T. S. Perova; B. P. Gorshunov; A. A. Volkov

doi:10.1117/12.619463

3 June 2005 Broad band infrared spectroscopy of grooved silicon

E. Yu. Krutkova, V. Yu. Timoshenko, L. A. Golovan, P. K. Kashkarov, E. V. Astrova, T. S. Perova, B. P. Gorshunov, A. A. Volkov

Author Affiliations +

Proceedings Volume 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks; (2005) https://doi.org/10.1117/12.619463
Event: OPTO-Ireland, 2005, Dublin, Ireland

Abstract

Grooved silicon (gr-Si) structures with a period of few micrometers, which were formed by anisotropic etching of (110) Si wafers, have been investigated by means of broad band infrared (IR) and submillimeter transmission spectroscopy. In the spectral region of 50-1000 μm the results are well explained by an effective medium model, which predicts a strong birefringence with a difference between refractive indices for ordinary and extraordinary beams to be about 0.73-0.77. The IR transmission of gr-Si in the range from 1 to 30 μm is strongly influenced by light scattering. The experimental results measured in the region 1-5 μm can be understood in the terms of the geometric optics.

Citation Download Citation

E. Yu. Krutkova, V. Yu. Timoshenko, L. A. Golovan, P. K. Kashkarov, E. V. Astrova, T. S. Perova, B. P. Gorshunov, and A. A. Volkov "Broad band infrared spectroscopy of grooved silicon", Proc. SPIE 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, (3 June 2005); https://doi.org/10.1117/12.619463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available